New Depostion Tool - MINIvap
MBRAUN’s mini-deposition tool consists of a dry turbo-molecular pump system with up to 70 l/sec and a single button operation. The MINIvap generates a base pressure less than 5e-6 mbar. The chamber is composed of stainless steel with a diameter of 150 mm, a exchangeable liner can be mounted as an option.
It may be integrated into existing MBRAUN gloveboxes, but can also be used as a stand-alone system.
It is possible to deal with substrate sizes up to 50x50mm. The loading process is manual.
The MINIvap can be additionally equipped with a range of mask and substrate holders, as well as a substrate shutter. Furthermore a temperature control of substrate heating/cooling can be added.