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The MPU-Series (Modular Purification Units) inert gas purification system is the economical solution for customers looking into the IGMS product line, but do not require the full specification. Offering the full technical specification of the G-Series and being equipped with additional features such as a Mitsubishi-FX control unit and the complete set of oxygen and moisture sensors this platform in its basic configuration is a top-seller specifically for customers in the Asian region. With its reduced overall height and a reinforced frame with castors the MPU allows easy move in and uncomplicated installation even in restricted spaces such as subfabs. With its capacity and flexibility offered by additional upgrades such as Mitsubishi Q-series controller, VCR connectors, quick purge units and custom data interfaces the MPU is the system of choice to fulfill the requirements for industrial production applications.

Please contact us if you have questions choosing the right inert gas management system for your specification needs.


  • Available version for clean dry air (CDA)
  • For enclosures up to 230 m³ with laminar flow* with laminar flow*
  • For enclosures up to 130 m³ without laminar flow*
  • Removal of oxygen and moisture down to less than 1 part per million
  • Closed loop recirculation
  • Automated regeneration sequence
  • All stainless steel piping type 1.4301 (SUS 304)
  • Electro-pneumatic main valves
  • Magnetic control valve
  • Encapsulated blower
  • CE compliant

*Technical note: Depending upon configuration and operating conditions.

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