Vacuum Coating Systems for Maximum Process Control
In the field of vacuum coating, MBRAUN develops and manufactures its own system solutions. From the vacuum chamber and process integration to integration into the inert gas environment, every element is part of a fully coordinated system concept developed and manufactured in-house.
Whether for research, development, or industrial manufacturing, our vacuum coating systems provide maximum control over your thin film processes. Benefit from scalable solutions, high process stability, and perfectly coordinated system configurations.
MINIvap
- Sample size up to 50 × 50 mm² for laboratory-scale coating applications
- Up to three LTE or HTE sources
- Optional two thermal evaporators (THE)
- Film thickness uniformity ≤ ±5% (Ø 30 mm)
- Available as a standalone system or integrated into a glovebox
Details:
With sample sizes of up to 50 × 50 mm², the MINIvap represents the entry point into MBRAUN's vacuum coating portfolio. Thanks to its simplified system control focused on essential functions and minimal training requirements, the semi-automatic system reliably evaporates up to three materials. Its compact footprint completes the concept and also allows easy retrofitting into existing glovebox systems.
Thanks to its well-designed construction, the MINIvap is particularly suitable for research, development, and small-scale production environments where flexibility and efficiency are essential. At the same time, its modular design enables easy adaptation to specific process requirements, providing a future-proof solution for a wide range of applications.
Application
ECOvap
- Sample size up to 100 × 100 mm² (Ø 156 mm / 6") for laboratory-scale coating applications
- Up to 4 freely configurable source types
- Selection of LTE, HTE, or THE sources in standard sizes
- Co-deposition capability
- Optional 500°C substrate heater
- Film thickness uniformity for LTE, HTE, and THE ≤ ±3%
Details:
With sample sizes of 100 × 100 mm² and freely configurable coating recipes, the ECOvap represents the next step toward fully PLC-controlled coating systems. From single-layer coatings to multilayer structures and optional substrate heating, the ECOvap enables the production of more complex film systems. Full integration into a glovebox ensures the safe handling of samples and materials under an inert atmosphere.
The system combines high process stability with intuitive operation and is ideally suited for demanding development and pilot-scale applications. At the same time, its flexible architecture allows easy expansion to efficiently meet future requirements.
UNIvap
- Sample size up to 150 × 150 mm² (Ø 156 mm / 6") for coating applications from single samples to small-batch production
- Up to 8 freely configurable source types
- Film thickness uniformity for LTE, HTE, and THE ≤ ±3%
- Two standard sizes: UNIvap 4S and UNIvap 5S
- Standalone system without an additional control cabinet
- Fully automated operation via 10" touch panel and PLC
Details
With up to eight freely configurable sources, the UNIvap covers a wide range of coating processes that do not require a glovebox. From organic materials and metallization to optical coatings, the UNIvap is highly versatile. Fully automated coating recipes and customer-specific source configurations make the UNIvap an all-round solution suitable for everything from initial trials and sample production to small-series manufacturing.
Its powerful process control ensures high reproducibility and consistent film quality, even for complex applications. The modular design and expansion options also provide excellent investment security and allow the system to adapt to growing requirements.
Application
PROvap
- Sample size up to 150 × 150 mm² (Ø 156 mm / 6") for coating applications from single samples to small-batch production
- Up to 8 freely configurable source types
- Film thickness uniformity for LTE, HTE, and THE ≤ ±3%
- Two standard sizes: PROvap 4G and PROvap 5G
- Standalone system without an additional control cabinet
- Fully automated operation via 10" touch panel and PLC
- Fully integrated into a glovebox with an additional service door
Details
With up to eight freely configurable sources, the PROvap supports a broad range of coating processes and has been specifically designed for operation inside a glovebox. From organic materials and metallization to optical coatings, the PROvap offers exceptional versatility. Fully automated coating recipes and customer-specific source configurations make the PROvap a powerful system suitable for everything from initial trials and sample production to small-series manufacturing.
Full glovebox integration ensures the safe handling of sensitive materials under a controlled inert atmosphere. At the same time, precise process control delivers high reproducibility and consistently excellent film quality, while the modular design enables flexible adaptation to future requirements.
Application
OPTIvap
- Sample size up to 200 × 200 mm² (Ø 200 mm / 8") for coating applications from single samples to small-batch production
- Flexible, modular system
- Available as a standalone (S) or glovebox-integrated (G) solution
- Two standard sizes: OPTIvap 4 S/G and OPTIvap 6 S/G
- Building block for cluster tools
- Supports multi-substrate and multi-mask processes
- Film thickness uniformity for LTE, HTE, and THE ≤ ±3%
Details
With up to 14 freely configurable sources, the OPTIvap covers an exceptionally broad range of coating processes. From organic materials and metallization to optical coatings, the OPTIvap is a highly versatile platform. Fully automated coating recipes and individually configured source arrangements make it a powerful solution for everything from research and sample production to small-series manufacturing.
The system is available either as a fully glovebox-integrated solution or as a standalone system, allowing optimal adaptation to different infrastructure and process requirements. In addition, the OPTIvap can be integrated into a cluster tool, enabling multiple process modules to be interconnected for continuous and efficient manufacturing workflows. Precise process control ensures high reproducibility and consistently excellent film quality, while the modular design provides additional flexibility for future expansion.
Application
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