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MB-EcoVap

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The MB-EcoVap tool is a high quality economic research solution when the available laboratory space is restricted. Even though compact in design all essential features for high-quality functional coatings are incorporated in its standard configuration, making it the perfect entry model for many research groups who have decided to take the first steps in exploring vacuum coating technology. Choosing from a comprehensive set of optional upgrades the MB-EcoVap system can be equipped to meet even more advanced requirements from experienced users.

Built according to MBRAUN's high quality standards the bell jar setup distinguishes itself from other compact solutions with an automatic, electro-pneumatic chamber lifting mechanism. The unique setup combines perfect accessibility of the sources with a space-saving design. In integral design of the MB-EcoVap is the embedded shielding that help prevent the chamber walls to become coated during the vacuum process, thus allowing an efficient cleaning of the interior chamber.

Originally designed to be integrated into an MBRAUN glovebox, the MB-EcoVap is available as a stand-alone unit as well, so that applications which do not require inert conditions can be served.

All commonly available sources for RF and DC sputtering, thermal resistance evaporation, organic material coatings and E-Beam processes have been integrated and are successfully used from MBRAUN's growing global customer base.

Other models in the MB-EVAP series include the MB-ProVap and MB-OptiVap which offer additional features. Please contact us if we can help support you in choosing the right thin film deposition system for your application.

Features

  • For substrates up to 70 x 70 mm or 100 mm wafers
  • Compact, space-saving design
  • Automatic chamber lifting mechanism
  • Shielded view port for visual process monitoring
  • Recipe programmable PLC control
  • Removable protective shielding
  • Compatible with most standard deposition sources
  • Ergonomic to operate, easy to clean
  • Available as glovebox integrated and stand alone
  • All stainless steel construction
  • UL listed and CE compliant

Options

  • RF or DC sputtering
  • Single and multi-pocket E-beam
  • Multi-source thermal metal deposition
  • Multi-source organic evaporation
  • Co-evaporation capabilities
  • Variety of available pump stacks
  • Rate & thickness control
  • Source & substrate shutters
  • Glovebox integrated or stand-alone

Specifications

Please note: Specification may vary depending on system configuration

Vacuum Chamber Specification

Bell Jar Design in 2 sizes

  • ø 350 mm x 500 mm high (inner volume 48 l)
  • ø 350 mm x 400 mm high (inner volume 38 l)
  • Full stainless steel with automatic, electro-pneumatic lifting mechanism
  • Removable protective shielding
  • Base flange with 14 high vacuum ports for source mounting
  • DN160 interface for vacuum pump stack
  • Shielded DN100 viewport in chamber front

Evaporation Technology

  • Thermal resistance evaporation
  • Temperature controlled organic evaporation
  • RF, DC or DC Pulsed Magnetron sputtering
  • RF Magnetron sputtering with reactive gases and upstream or downstream control (mass flow controller)
  • Electron beam evaporation with multiple pocket arrangements (available in various combinations)

Substrate Size

  • For substrates up to 70x70 mm or 100 mm wafers (*depending on source configuration)

Substrate Fixture

  • Available on request for substrates and/or masking assembly

Substrate Rotation

  • Optional up to 33 RPM

Vacuum Pump Configurations

Rough Vacuum

  • Oil-sealed rotary vane pumps
  • Dry scroll vacuum pumps

High Vacuum

  • Turbomolecular pumps with a pumping speeds of 260 l/s, 560 l/s or 1100 l/s
  • Cryogenic-pumps with pumping speeds up to 1200 l/s

* Other pump configurations on request

Vacuum Measurement

  • Wide range vacuum gauge (Pirani/Penning)

Ultimate Vacuum

  • Depending on the final vacuum pump and source configuration down to: < 9 x 10-7 mbar

System Control

  • Siemens PLC with multi-color touch screen
  • Inficon controller for rate control/monitoring
  • Recipe management

Substrate Pre-treatment

  • Integrated quartz lamp heaters
  • Optional in-situ systems available on request

 

 

 

 

 

 

 

 

 

Related Products

MB-ProVap-3

The MB-ProVap-3 is a research and development tool for thin film deposition under vacuum conditions. The rectangular shaped chamber offers additional space for more sources and optional upgrades such as substrate heating and advanced masking solutions.

MB-ProVap-5

The MB-ProVap-5 is a versatile research and development tool for thin film deposition under vacuum conditions. The medium size chamber offers additional space for more sources and optional deposition tools such as substrate heating and masking.

MB-ProVap-7

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MB-OptiVap

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MB-Sources

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